Used TEL / TOKYO ELECTRON Lithius #9314371 for sale
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A photoresist equipment, such as TEL / TOKYO ELECTRON Lithius, is a basic lithography system used in the manufacturing of semiconductor integrated circuits. In the lithography process, light energy is used to transfer a circuit pattern onto a photosensitive film (photoresist) which is then transferred onto the surface of a silicon wafer through chemical processes. This process effectively creates multiple replicas of the circuit pattern. TEL Lithius is a photolithography machine designed for compact, linear movement. It provides a high-precision, high-speed, and cost-effective solution for semiconductor fabrication, allowing for pattern transfer with a quick cycle time. This unit utilizes a highly sensitive projection aligner camera and an automated software machine to ensure that the circuitry patterns are accurately transferred onto the photoresist. The tool is also equipped with an integrated monitor-and-control asset for precise pattern exposure settings. TOKYO ELECTRON Lithius photolithography machine is capable of precise sub-micron resolution, making it suitable for use in high-volume production runs. The model utilizes high-precision scanners for accurate exposure control at a wide range of magnifications, and an advanced metrology equipment to provide rapid feedback on any exposed alignment errors. The system also features a high-speed quartz imaging unit with advanced digital image processing for high quality photomask patterns. Lithius provides a reliable and accurate solution for semiconductor fabrication. It is a highly intelligent machine that provides extremely accurate results and high throughput rates at minimal cost. Additionally, the tool is user-friendly and is capable of self-diagnosis, making it an invaluable tool in the production of complex semiconductor devices.
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