Used TEL / TOKYO ELECTRON Lithius #9361840 for sale
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TEL / TOKYO ELECTRON Lithius is a photoresist equipment designed for advanced-level processes in semiconductor manufacture. Photoresist systems are widely used in chip manufacturing in order to create circuit patterns that will be used to drive electrical signals. The primary function of photoresist systems is to enable Etching (Removal of material by chemical or physical means) versus Deposition (Adding material in a continuous fashion) by chemical reaction and/or physical force. TEL Lithius enables the etching of micro-sized wafers over a wide range of etching parameters, all held to a precision of 0.001 \\m (microns). Using a variety of upscaling solutions, it is capable of handling up to 3 inch wafers. The system works in three steps: first is the patterning of the photoresist, followed by focused etching to remove material, and finally selective deposition to fill the patterned space. TOKYO ELECTRON Lithius provides comprehensive support for advanced lithography processes. It supports a range of optical systems including an advanced electron beam unit that enables users to create precise sub-micron circuit patterns. The machine is designed to be highly accurate with precise optical resolution compensating for any drift. Additionally, a high precision tilting stage allows the tool to tilt substrate at up to 0.1 degree resolution providing ultra-high wafer uniformity. Lithius can provide high etch rate, high selectivity, and low susceptibility to chamber contamination. Through advanced etch technologies and gas control, a variety of effects can be achieved such as arcing and reactive sputter. Finally, with the ability to automate all processes including gas delivery, vacuum maintenance, consumption monitoring, and cleaning/monitoring cycles, TEL / TOKYO ELECTRON Lithius is a highly efficient and cost-effective photoresist asset.
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