Used TEL / TOKYO ELECTRON Lithius #9362659 for sale

TEL / TOKYO ELECTRON Lithius is a photoresist equipment used in semiconductor device fabrication. It is a high-end lithography system specifically designed for the mass production of photomasks and devices. This unit is based on a patented, multi-beam technology, which enables high-precision patterning even at smaller feature sizes. The machine is also capable of producing patterns with up to 5nm resolution, even at high throughput rates. The tool consists of a scanner, an exposure tool, and an imaging asset. The scanner moves the substrate over the imaging model in a controlled manner to expose the desired patterns. The exposure tool allows users to control the intensity and the focus of the pattern. This ensures high precision while supporting a wide range of process conditions. The imaging equipment consists of a detector, an image processor and a fine stepper motors. The detector collects and extracts the pattern information from the photomask. The image processor then organizes and manipulates the data to construct the desired structures. The fine stepper motors then align and focus the imaging system to ensure high-precision patterning. TEL Lithius resists unit also supports a wide variety of photoresists including positive and negative photoresist, positive-tone and negative-tone photoresists, and even organic photochemistry. It also allows users to easily integrate process control algorithms to maximize yield and save on costs. Finally, the machine is also designed with safety features such as an automatic contamination detection tool, an emergency safety shutter, and a passive security asset. These features ensure the model remains safe and operational at all times. Overall, TOKYO ELECTRON Lithius is a versatile and reliable photoresist equipment capable of delivering very high-precision patterning even at smaller feature sizes. It offers users a range of photoresists suitable for a variety of applications, as well as an easy integration process control algorithms. Finally, it comes with various safety features to ensure users remain protected against any potential accidents.