Used TEL / TOKYO ELECTRON Mark 5 #9394083 for sale

TEL / TOKYO ELECTRON Mark 5 photoresist equipment is a critical component of semiconductor manufacturing processes, with its major applications centering on the development of fine-pitch optical patterns and highly dense interconnects. TEL Mark 5 supports the development of resist images for a wide range of substrates, allowing for the optimization of the optical pattern images. The system consists of two parts, the exposure unit and the control console. The exposure machine consists of an optical table with its integrated mirror panels, lamp housing and lens mount, and the scanning tool. The optical table provides a flat and stable platform for the optical asset. The mirror panels are configured with high precision so that the laser beams from the laser source fully reflect from the mirror panel and then directly expose the center of the substrate. The lamp housing provides an optimal environment for the operation of the laser and lens mount, while the lens mount ensures the optimal position of the lens necessary for the exposure process. The scanning model includes a laser source, a reflecting mirror and a galvo mirror. The laser source is capable of emitting a wide range of wavelengths with excellent beam uniformity, brightness and accuracy. The reflecting mirror produces a series of scanning lines that enable the substrate to be aligned precisely, while the galvo mirror is responsible for increasing throughput speed. The control console unit serves as the engine of TOKYO ELECTRON Mark 5 photoresist equipment. It is equipped with a temperature control and a safety monitor, which are necessary for understanding and controlling process parameters. It is also equipped with an embedded, user-friendly graphical user interface (GUI) providing easy access to system settings, which can be optimized to meet customer requirements. Additionally, the control console features a programmable logic controller (PLC) providing automatic, closed-loop control of various unit parameters. In summary, Mark 5 photoresist machine is a versatile tool for developing optical patterns with high precision. It features a sophisticated exposure asset and a powerful control console allowing for the optimization of various parameters. With its advanced features and reliable performance, TEL / TOKYO ELECTRON Mark 5 is the model of choice for today's semiconductor manufacturers.