Used TEL / TOKYO ELECTRON Mark 5z #9222497 for sale

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ID: 9222497
Vintage: 2000
System 2000 vintage.
TEL / TOKYO ELECTRON Mark 5z is an advanced photoresist equipment that is used for the development, transfer, etching, and analysis processes of semiconductor manufacturing. The system offers lithography capabilities for dielectric, metal, and photoresist layers. It is equipped with an advanced 5x optical zoom unit which allows for precise targeting of photoresist features with great accuracy. The machine is further equipped with UV exposure module and a UV stepper with high accuracy and quick exposure times for high throughput applications. The tool uses a high-resolution scanning asset for image recognition, and can acquire images quickly with low noise. It also features pre-alignment, auto-tilt, and auto wafer-to-wafer alignment for precise targeting of features. The deliverables of TEL Mark 5z exceed the demands of current semiconductor lithography processes. It provides a smooth operation flow with optimized accuracy for complete image accuracy via the integrated image measurement feature. The model is further equipped with an automatic focus adjustment mechanism to ensure it remains in "on-target" for photoresist layers, even when environmental conditions change. In terms of safety TOKYO ELECTRON Mark 5z is designed for safe use, with multiple safety levels that can be adjusted to suit specific needs and conditions. The equipment uses a special anti-vibration structure with a sealed door to protect users and equipment during operations and prevent environmental contamination from entering the chamber or reticle area. The system also provides environment protection functions such as an air purification unit, UV opacity sensor, and ion injection machine to ensure the clean and safe operation of the photoresist layer. Finally, Mark 5z offers a comprehensive user interface tool with multiple features to facilitate easy pattern programming and monitoring of operational parameters. It also has networking capabilities that allow the user to remotely access machine condition, operational parameters, and pattern programming information from remote locations. In conclusion, TEL / TOKYO ELECTRON Mark 5z is an advanced photoresist asset that offers maximum precision, accuracy, and safety for dielectric, metal, and photoresist layer applications. It can easily handle high throughput applications with its UV exposure module and UV stepper, and is capable of smooth operation with optimized accuracy for complete image accuracy via its integrated image measurement feature. In addition, the model ensures safe operation with its multiple safety levels and environment protection functions, and it is equipped with comprehensive user interface equipment and networking capabilities for remote access of machine condition, operational parameters, and pattern programming information.
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