Used TEL / TOKYO ELECTRON Mark 7 #9098210 for sale

TEL / TOKYO ELECTRON Mark 7
ID: 9098210
Wafer Size: 8"
Vintage: 1994
(1) Coater / (2) Developers system, 8" 1994 vintage.
TEL / TOKYO ELECTRON Mark 7 is a state-of-the-art photoresist equipment developed by TEL that has been designed to improve the precision and capability of resist imaging. It is a multi-tasking platform that can support two independent photoresist processes and four sets of independent overhead gantries, allowing for multiple simultaneous exposures of the same quartz plate or multiple plates in both optical and digital formats, while also providing the capability to handle challenging substrates. TEL MARK7 has two main components—a lithography chamber and an off-axis exposure system. The lithography chamber is a cleanroom and is equipped with state-of-the-art controls for maximizing throughput and accuracy. It includes an ultra-high vacuum (UHV) unit that can create a vacuum within the chamber, enabling the resist to be exposed without any air. The chamber also has a reactive plasma source, which helps to improve the adhesion of the resist to the substrate before exposure. The exposure machine is a high-resolution tool capable of accurately imaging features on the wafer with extremely high precision. It has an off-axis source of illumination that enables precise focusing of patterns onto the wafer substrate, regardless of the substrate's orientation or thickness. This off-axis asset is especially important for imaging three-dimensional structures. The exposure model also has advanced control features that help to ensure that the exposure process is efficient and consistent, high-speed motor control to accurately move the masks, and automatic distortion, size, and placement measurements for ensuring an accurate exposure. Additionally, the equipment has an intuitive user interface that provides diagnostics, process monitoring and fault detection capabilities. TOKYO ELECTRON MARK-7 is an innovative system that provides superior imaging capability and performance, as well as improved yield, throughput, and unit uptime. It also helps to reduce costs and time to market due to its high-throughput and flexibility. This photoresist machine is an ideal tool for manufacturing high-end electronics and provides the reliability and performance needed to keep up with industry trends and demand.
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