Used TEL / TOKYO ELECTRON Mark 7 #9235179 for sale

TEL / TOKYO ELECTRON Mark 7
ID: 9235179
Wafer Size: 8"
Vintage: 1995
Track systems, 8" 1995 vintage.
TEL / TOKYO ELECTRON Mark 7 is an advanced photoresist equipment that enables fast and accurate resist processing. It is a fully automated, closed loop system that controls the resist dispense, exposure, and bake in a single step. TEL MARK7 also provides a wide range of exposure and clean-up parameters to accommodate various resist processing applications. TOKYO ELECTRON MARK-7 is equipped with the Calibrated Dispensers (CD) which are designed specifically for photoresist applications. It has an adjustable dispense nozzle to ensure a uniform and repeatable dose of photoresist. The dispense head is also capable of controlling temperature and pressure. TEL / TOKYO ELECTRON MARK-7 offers an ultraviolet (UV) exposing unit and shadow-free exposure unit. It incorporates an advanced air knife machine to keep developing areas clean, thus reducing the development time and increasing accuracy. TOKYO ELECTRON MARK7 also has built-in process algorithms to provide accurate exposure times for different processes, like HF or UV exposure. TEL / TOKYO ELECTRON MARK7 also features an Active Heat Control Tool (AHCS). This asset uses a PID controller to accurately control the heating elements. It also offers a choice of multiple temperature profiles, allowing users to select the best temperature profile for their specific application. In addition, TEL MARK-7 offers an independent over pressure model which ensures uniform pressure on the photoresist during the exposure process. TEL Mark 7 also has an automated resist clean-up module. This module uses an integrated nozzle equipment to clean the remaining resist on the substrate. The cleanser removes the photoresist from the entire substrate surface without leaving behind traces. MARK7 is capable of handling substrates up to 4mm thick with a substrate size of up to 200mm x 300mm. It can handle a maximum of 12 substrates at a time with manual loading. The efficiency and accuracy of MARK-7 makes it the ideal photoresist processing system for a wide range of applications.
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