Used TEL / TOKYO ELECTRON Mark 7 #9239616 for sale

TEL / TOKYO ELECTRON Mark 7 is a photoresist equipment developed by TEL (TOKYO ELECTRON). It is a resist-developing processor used in photolithography and patterning processes for the manufacture of semiconductor integrated circuits. This resist-processing system is based on a modular design and consists of a resist coater, a developer, a stripper, and a dryer/oven. The resist coater is used for the application of photoresist on the substrate. It allows for precise control of the coating weight and thickness, and also facilitates the application of antireflective coatings on the substrate. The developer is used to selectively remove the resist material from the non-image regions on the substrate. It utilizes high-pressure aerosol technology to enable the rapid removal of photoresist to create intricate patterns on the substrate. The stripper is a separate unit used for the removal of any residual photoresist. It is capable of removing up to 99.5% of thick resist films on the substrate. The dryer/oven is used to heat the substrate and remove any remaining solvents and other contaminants. It can process up to four substrates of up to 200mm in diameter at one time. It has a heating capacity of up to 250°C and utilizes an air design to minimize substrate distortion. TEL MARK7 contains a variety of sensors to ensure that the substrate is accurately heated and processed. TOKYO ELECTRON MARK-7 also features an intuitive, user-friendly graphical interface, as well as a variety of custom recipes and process protocols. It provides a range of statistical process control (SPC) functions to ensure that the substrate is processed with the highest accuracy and repeatability. The machine is suitable for the cleaning, sealing, and anti-reflection coating of several materials, which include quartz, silicon, aluminum, and copper. MARK-7 is an efficient and reliable resist-developing tool created for the photolithography process. With its modular design and a wide range of process capabilities, TOKYO ELECTRON Mark 7 provides an ideal platform for the manufacture of integrated circuits.