Used TEL / TOKYO ELECTRON Mark 7 #9239700 for sale

TEL / TOKYO ELECTRON Mark 7 is a photoresist equipment designed for electron beam lithography, developed to assist with the fabrication of integrated circuits, and other microelectronic components. The system includes a specialized beam deflection unit to precisely expose substrates by delivering high-energy electrons in limited areas. This provides a more localized and intense voltage profile than traditional exposure techniques, allowing for improved pattern control. TEL MARK7 contains an advanced ion source with focusing coils, which ensures that the beam is concentrated into a small spot size, reducing the chance of stray electrons and spreading the effective voltage over a small area. In addition, the machine uses a specially designed electron deflector to allow for full-area scanning with enhanced feature definition and deposition control. Combined, these components enable fast electron beam processing with high feature resolution as low as 0.1 microns. Additionally, TOKYO ELECTRON MARK-7 has a programmable plasma source and temperature control, allowing for the precise delivery of heat-activated photoresist or other EPIL materials to the area of interest. This ensures uniform coverage of the substrate even when the electron beam needs to apply energy over multiple exposures. Finally, TEL Mark 7 tool is equipped with an integrated optical microscope asset to inspect the exposed substrate. This eliminates blind spots and ensures that the processing is accurate. Furthermore, an automatic stage alignment model is used to ensure that the beam is always de-focused and kept away from the part which is being inspected, making it safer to use. With all of these features, MARK-7 is an industry leading photoresist equipment for electron beam lithography, offering both accuracy and safety for the processing of microelectronic components.