Used TEL / TOKYO ELECTRON Mark 7 #9242345 for sale

TEL / TOKYO ELECTRON Mark 7
ID: 9242345
Wafer Size: 5"
Vintage: 1995
(2) Developer system, 5" (5) HP CHP (4) COL (2) Chemical boxes 1995 vintage.
TEL / TOKYO ELECTRON Mark 7 is a Next Generation Photoresist Equipment that is capable of providing ultra-precise, ultra-fast, and low-cost lithography to enable high-performance integrated circuit patterns and wafer processing. TEL MARK7 system is designed to support advanced circuit designs and the most advanced processing technology to meet today's demanding semiconductor manufacturing needs. TOKYO ELECTRON MARK-7 utilizes the latest in diffuse illumination technology to provide ultra-sharp and accurate patterning and frontside alignment. The unit is equipped with a high-performance laser interferometer to ensure ultra-precise alignment of the mask and wafer throughout the process. With TOKYO ELECTRON MARK7, even the most difficult-to-pattern masks can be consistently generated with excellent performance. The machine also features a high-precision, high-speed patterning tool for shortening the exposure time. MARK-7 has a built-in Collimator lens that produces a larger focal depth to minimize pattern misalignment. TEL MARK-7 also includes an Automated Metrology and Alignment Asset (AMAS) for precise post-exposure metrology and alignment. This model provides accurate wafer positioning and alignment to minimize undercutting and over-etching. The AMAS also simplifies pattern inspection and defect detection during the exposure process via the use of fast-scanning optics. The equipment also includes a variety of features to enhance process control and reduce maintenance costs. TEL / TOKYO ELECTRON MARK7 has a powerful Software Workstation with MAGIC (TEL Mark 7 Graphical Interface Control) software that streamlines operation and results in simpler and faster device setup. Additionally, the system has built-in controls and cameras to monitor the entire process, improve process stabilization, reduce the incidence of particle-induced defects, and provide rapid feedback information. TEL / TOKYO ELECTRON MARK-7 unit is designed to provide precise, fast, cost-effective photoresist processing for the latest integrated circuits. With its advanced illumination, frontside alignment machine, Automated Metrology and Alignment Tool, and MAGIC software, Mark 7 is capable of producing world-class device patterns with high dimensional accuracy and uniformity.
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