Used TEL / TOKYO ELECTRON Mark 7 #9244864 for sale

ID: 9244864
Wafer Size: 8"
Vintage: 1999
System, 8" 1999 vintage.
TEL / TOKYO ELECTRON Mark 7 is a fully automated processing equipment used in the photomask making industry. The system features highly advanced technology that enables accurate patterning results with minimal exposure time. Its self-contained laser ablation unit and electronic board provide a comprehensive set of functions. The unit's integrated design ensures simple operation and maintenance. TEL MARK7 employs a fully automated mask selector to select the optimum exposure performance parameters to suit the desired print pattern. This ensures precise mask preparation for superior image processing. The machine's distinctive feature is its proprietary film corrosion layer removal subsystem. This feature allows rapid and efficient ablation of photoresist and etching. The corrosion layer removal subsystem is one of the most effective technologies for fully computerized mask making. TOKYO ELECTRON MARK-7's film-to-film exposure mode eliminates any movement of the wafer or seed layers during the exposure process. This is achieved through a "ramp" exposure process where the exposure time ramps up and down to control the intensity and develop uniform exposure coverage. This means that the mask pattern is exposed without any discrepancy in subsequent layers of the substrate. The tool's high-precision wafer manipulator ensures precise focusing and alignment of the laser module. The laser is used to precisely modify and shape any residual surface defects or scratches that might be present in a substrate. The wafer manipulator also ensures that the laser motion is controllable and precise enough to expose and develop patterns with smooth edges. The microscope unit of the asset allows defects on a wafer to be precisely recognized in order to minimize substrate damage and produce finer patterns. TEL MARK-7 is a state-of-the-art processing model that allows an easy to-use automated mask making process. Its unique features provide the highest level of accuracy in all areas of mask making, while reducing costs and time. These features make TOKYO ELECTRON Mark 7 a highly valued tool in the photomask making industry.
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