Used TEL / TOKYO ELECTRON Mark 7 #9244883 for sale

ID: 9244883
Wafer Size: 8"
Vintage: 1995
System, 8" 1995 vintage.
TEL / TOKYO ELECTRON Mark 7 (TEL MARK7) is a world class photoresist equipment designed for photolithography and other lithographic processes. It combines advanced motor control technology, thermally controlled process-head designs, ultra-precise optics and a unique wafer holder design to create a highly accurate and reliable system. The unit has an integrated loading capability, allowing users to load wafers automatically and monitor the whole process. TOKYO ELECTRON MARK-7 is able to detect and correct any excessive exposure while controlling resist patterns during the lithography process, which leads to a higher yield. The machine has a powerful algorithm for geometrical distortion correction due to depth of field, being able to execute image evaluation with an accuracy of up to 2/1000. It also uses an advanced laser scanning tool for coating, aligning and measuring, allowing for a high degree of accuracy. MARK-7 has several advanced features which make it stand out from the crowd. The asset uses proprietary high-performance optics which enable it to have a higher degree of accuracy than other conventional systems. It is designed for maximum precision, as it uses advanced 3-dimensional tilt control technology and state-of-the-art servo drive. TOKYO ELECTRON Mark 7 also has a distinct feature that allows for the pulsed laser beam energy restitution, which essentially helps to reduce substrate distortion by utilizing a built-in active cooling model. Moreover, the equipment features a modular design which simplifies maintenance and upgrade procedures. Its efficient and fast operations also allow for the system to remain economical by requiring minimal production costs. The unit is built to last and due to its built-in diagnostics, users will be alerted earlier in the event of any fault. In summary, Mark 7 is a premium photoresist machine that offers many advantages over other systems. It is well-equipped with advanced motor control technology, precision optics, and wafer holder design for increased accuracy and efficiency. Its modular design makes maintenance and upgrades easier, while its built-in diagnostics increases the tool's reliability and longevity.
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