Used TEL / TOKYO ELECTRON Mark 7 #9399016 for sale

TEL / TOKYO ELECTRON Mark 7 is a photoresist processing equipment designed for the fabrication of semiconductor devices. It is a compact and highly automated tool used to create high accuracy and high volume photoresist patterns. The process starts with the application of photoresist onto the substrate. This is done by a horizontal spin-on coater, providing uniform coverage of the photoresist on the wafer surface. The applied photoresist is then baked by a hot plate to securely fix it on the substrate. The photoresist system then illuminates the substrate with a photomask containing the desired pattern. A special illumination mechanism ensures optimum irradiance of the mask and streamlines the process. An integrated VUV illuminator designed for maximum stability and optimum image accuracy represents a vital part of the unit. After exposing the substrate, the machine washes away unwanted photoresist using a special type of solvent. This is usually done using a vaporized hydrocarbon bath, a process known as RIE (reactive ion etching). The exposed and washed substrate is then developed. Any remaining photoresist is removed using proprietary developing fluids. The tool is calibrated to ensure uniform development of the wafer and to eliminate the formation of residues. Once the wafer is developed, it is transferred to the drying module. This module uses an active drying process that allows an even and consistent distribution of the photo resist on the surface. The drying stage is necessary to preserve the pattern and to achieve high yields. TEL MARK7 photoresist processing asset is a great tool for creating high accuracy and high yield nanometric photoresist patterns. It is reliable and cost-effective, and its use of cutting-edge technology makes it the standard tool of many semiconductor companies.