Used TEL / TOKYO ELECTRON Mark 8 3C #9290536 for sale
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TEL / TOKYO ELECTRON Mark 8 3C is a photoresist equipment manufactured by TEL that is used in semiconductor device manufacturing. The system is both a film applicator and developer and is used to generate photoresist patterns on semiconductor wafers. The unit is equipped with a stepper that is used to guide the wafers through the process. The stepper is equipped with an alignment chuck to ensure accurate positioning of the wafers during the process and is configured to transfer alignment information from the reticle. The exposure times can be varied as needed and a scan mirror can be used on select models to increase productivity. The machine has a built-in gas delivery tool that can be tailored to the specific resist chemistry being used. It is capable of supplying inert gases such as nitrogen or sulfur hexafluoride for resist removal, as well as oxygen for plasma cleaning. The asset can also be used for processing other photomask substrates, such as glass, quartz, and metal. The model has an integrated CR rotary arm that is used to apply photoresist to the wafer surface. The arm is capable of achieving uniform coverage of the photoresist-covered wafer while avoiding smearing and pooling of the resist material. It is compatible with a wide range of photoresists, with motorized adjustment and a precision micro-dosing pump. The equipment also features a PhotoMaster controller for controlling and monitoring wafer processing. The controller is capable of carrying out both semi and fully-automatic operation and stores process recipes. The PhotoMaster controller can also measure and display exposure doses. TEL Mark 8 3C photoresist system offers an advanced and reliable tool for high-precision, high-throughput photomask patterning that enables the stable, cost-effective manufacturing of semiconductor devices. It is a valuable tool in the process of photomask production.
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