Used TEL / TOKYO ELECTRON Mark 8 #9098383 for sale
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ID: 9098383
Wafer Size: 8"
Vintage: 1996
(2) Coaters / (2) Developers System, 8"
7CP
1AD
6HP
1WEE
2-1 RRC x3
EBR cylinder
(1) 2-2 Iwaki
E2
Komatsu
I/F Nikon i12D
(2) M/A
LtR
1996 vintage.
TEL / TOKYO ELECTRON Mark 8 is a photoresist processing equipment designed to create precision microcircuitry on semiconductor wafers. It allows for accurate control of the exposure, diffusion, and etching of the photoresist layers which are used to pattern very small devices on semiconductor chips. TEL MARK8 consists of a light mask, which is used to expose the photoresist film to UV light to form photoresist shapes. This is followed by two diffusion furnaces, which cook the exposed film to dissolve away unprotected areas and create the desired pattern. TOKYO ELECTRON MARK-8 also includes two systems for etching the pattern into the underlying substrate. The first allows for the etching of deep trenches, commonly used to create contact pads and other deep electrical structures. The second etches away the photoresist film itself, thus exposing the underlying substrate in the desired locations. Other features of the photoresist system include chemical and mechanical scrubbing units to remove particles before resist deposition, a deionized water bath, and two unit for inspecting the device pattern after processing. The first is a microscope attachment which allows users to examine the patterns at high magnification, and the second is an electrical tester which throws a voltage across the device to make sure it functions correctly. In sum, MARK8 is a comprehensive photoresist processing machine capable of creating precise microcircuitry devices with exacting control over exposure, diffusion, and etching. This tool is a critical component of modern chip fabrication plants worldwide, and its reliability and accuracy are essential for creating high-quality semiconductor components.
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