Used TEL / TOKYO ELECTRON Mark 8 #9098384 for sale
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ID: 9098384
Wafer Size: 8"
Vintage: 1996
(2) Coaters / (2) Developers System, 8"
6CP/1AD/7HP/1WEE
2-1 RRC x4
2-2 Iwaki x4
THC
FFU: PCW
C/B
Komatsu
LtR
9801F
Local
1996 vintage.
TEL / TOKYO ELECTRON Mark 8 is an advanced photoresist equipment designed for use in semiconductor processing. It is capable of etching and deposition, as well as positive and negative resist patterning processes. Photoresists are essential in integrated circuits (IC) fabrication because they allow the manufacture of device architectures with precisely defined shapes on silicon wafers. TEL MARK8 features a state-of-the-art imaging and patterning system. Its production employs a high-efficiency evaporator alongside a spin-coater. The evaporation process allows for precise temperature and vapor deposition control, while the spin-coater provides uniform and consistent resist coating. The unit is also equipped with an advanced stage machine for automated wafer transport and handling, as well as an adjustable bipolar power supply to regulate the intensity of the active etching agent. This precision enables it to etch and deposit materials in the deepest of wells. The tool also has an upscale resolution of 1 micron due to its cutting edge optics. This feature ensures precise geometries and shapes on the wafers. Additionally, TOKYO ELECTRON MARK-8 contains a superior sputtering rate control asset which produces high-performance films with fine particles and during processing. This effectively produces high density patterns with an uncompromised layer-to-layer adhesion. TOKYO ELECTRON MARK8 is specially designed for advanced and heavy-duty applications. It can fabricate patterns down to 50 nm with accuracy levels of 0.5μm. Its automated wafer handling capabilities and precisely adjustable bipolar power supply makes it very suitable for high volume production of high precision semiconductors. Additionally, its superior sputtering rate control allows it to effectively produce deep etching films and shapes on the most delicate of substrates. With its excellent combination of precision, accuracy and throughput, Mark 8 is a top end photoresist model designed for the most demanding semiconductor fabrication needs.
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