Used TEL / TOKYO ELECTRON Mark 8 #9098385 for sale
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ID: 9098385
Wafer Size: 8"
Vintage: 1996
Coarter / (3) Developer system, 8"
6 HP
(4) CP
WEE
(4) 2-1 RRC
EBR Stepping
E2
Komatsu
THC
C/B
I/F
LtR
1996 vintage.
TEL / TOKYO ELECTRON Mark 8 is a fully automatic photoresist equipment designed for use in advanced semiconductor device processing. It is suitable for applications such as lithography, photolithography, wafer cleaning, and other photomask processing operations. The system features a fully automated optical arm and CCD camera to precisely control exposure parameters by adjusting focus and aligning to the photoresist surface. It is equipped with a high-resolution digital camera for measuring the imaging performance of photomasks at multiple positions. Additionally, the unit has a custom scan grain size control machine to ensure successful device processing on various types of photomasks. The tool is designed for advanced semiconductor device processing with process control and consistency. It has user-friendly control interfaces for rapidly setting up experiments, adjusting parameters, and monitiring the progress. Additionally, the asset has a statistical quality control model to perform predictive maintenance to ensure optimal performance. TEL MARK8 photoresist equipment provides high exposure uniformity and vertically aligned results to ensure process yields and extend photomask lifetimes. Additionally, its compatibility with all photoresists ensures maximum flexibility, enabling users to process a wide range of substrates and materials. Furthermore, its low-pressure, low-vacuum processing capabilities provide safe and efficient operation, minimizing the risk of substrate or photomask damage. In conclusion, TOKYO ELECTRON MARK-8 photoresist system is designed for advanced semiconductor device processing. It provides high levels of exposure uniformity and exposure control, ensuring process yields and photomask lifetimes. Its user-friendly interfaces, compatibility with all photoresists, and low-pressure, low-vacuum processing provide safe and efficient operation.
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