Used TEL / TOKYO ELECTRON Mark 8 #9098390 for sale
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TEL / TOKYO ELECTRON Mark 8 (TM8) is a photoresist equipment designed for use in the lithography process. Photoresist is a type of polymer that is sensitive to light. The TM8 utilizes a light source to expose a pattern on a substrate and then deposits a resist layer into the desired area. The TM8 is an automated patterning system that utilizes an advanced design that is capable of automated processing with accuracy and repeatability of one micron or less. The unit utilizes three stage patterning - pre-exposure, exposure, and post-exposure. The pre-exposure stage utilizes a stage-movement machine to move the wafer from the cassette to the alignment unit within the tool. The alignment asset uses lasers to ensure precise positioning of the wafer for the exposure process. The exposure stage is responsible for projecting a light source onto the substrate. The TM8 utilizes high intensity UV light emitters to pattern the wafer with high throughput results with alignment accuracy. The photoresist is applied before the exposure process and then the light activates the resist material in the desired area. The post-exposure stage comprises of a baking model that is used to dry the photoresist layer. The baking equipment also provides hardness to the layer. After this the resist is then registered for further process steps. Overall, TEL MARK8 is a powerful photoresist system designed to provide powerful and accurate patterning for photolithography applications. Its automated features provide a fast and reliable exposure process while delivering repeatable and accurate results. The TM8 can handle wafers up to 300mm in diameter. The TM8 is a cost effective tool for semiconductor manufacturers and integrated circuit fabrication facilities.
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