Used TEL / TOKYO ELECTRON Mark 8 #9098391 for sale
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ID: 9098391
Wafer Size: 6"
Vintage: 1995
(1) Coater / (1) Developer System, 6"
(1) Scr
1995 vintage.
TEL / TOKYO ELECTRON Mark 8 is an innovative photoresist equipment designed to provide greater precision for semiconductor production. This system uses automatic exposure exposure control and advanced laser technology for accurate precision which allows for the development of more intricate designs and structures. TEL MARK8 is an advanced dry etch unit with an exposure chamber integrated in an automated tool. This solution supports up to eight steppers and enables creation of complex processes for high-precision semiconductor production. TOKYO ELECTRON MARK-8 is sold as a complete machine including several components such as a stepper, photoresist, a programmable logic controller (PLC) and a chamber. The PLC controls all events, including process optimization, during the etching process. This tool provides a variety of features to enhance the accuracy and precision of the process, including pattern recognition, exposure assessment, and process parameter optimization. The photoresist in this asset is designed to ensure that the precision and quality of the etched pattern is consistently high. TEL / TOKYO ELECTRON MARK-8 is able to achieve extremely high CD (critical dimension) control due to its high-end optical model, such as its high-quality lenses and precision beam delivery equipment. The photoresist used provides increased precision for large exposure area, improved uniformity, and high-resolution resolution. TEL / TOKYO ELECTRON MARK8 also has a programmable logic controller (PLC), which is designed to increase the accuracy and speed of the etching process. The PLC is capable of maintaining real-time control of the etch process and can be programmed to meet the specific application requirements. The resulting profile information exchanged between the photoresist and the PLC enables the controller to adjust process parameters and identify any areas that may have an adverse effect on the etch process. Furthermore, Mark 8 is designed to be integrated in existing production lines and is able to be utilized with existing products. This system is also designed for high-speed operation and is capable of etching up to 20 wafers per hour. The result is an efficient and cost-effective etching solution that supports the production of high-precision devices. Overall, TEL MARK-8 is a high-performance photoresist unit that provides greater precision and accuracy for semiconductor production. The machine offers an integrated solution that includes the exposure chamber, photo-resist, PLC and stepper to enable sophisticated etching. It is suitable for a variety of applications and offers a high-speed production solution.
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