Used TEL / TOKYO ELECTRON Mark 8 #9098400 for sale
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ID: 9098400
Wafer Size: 8"
Vintage: 1994
(1) Coater / (2) Developers System, 8", 1994 vintage.
TEL / TOKYO ELECTRON Mark 8 is a photoresist equipment that is used to enable the creation of circuit patterns on a semiconductor substrate. It makes use of both photolithography and etching techniques, allowing for the creation of patterned metal lines in the substrate. The photoresist system uses a photomask with the desired pattern, which is then introduced into the unit. First, the substrate is coated with a photoresist material using a spin process. The substrate is then exposed to UV light through the photomask. During this process, light will interact with the photo-resist material, changing its properties. After the exposure, the substrate is rinsed off in a solvent to either remove the unexposed photoresist material or leave the exposed portion. The exposed portion of the photoresist should remain, acting as a "stencil" for etching. The etching process is then employed to remove the substrate material in the area where the exposed photoresist remains. This creates the desired pattern of metal lines. Pre-metal dielectric deposition is then added, which is a layer of insulating material on the metal lines. This increases device reliability and provides an electrical connection between the etch part and the substrate. Finally, the exposed photoresist must be removed before the wafer can be tested. This is usually accomplished by ashing or immersing in a developer solution. TEL MARK8 brings a variety of benefits to the process of creating metallic lines on a substrate. It eliminates the need for multiple steps to separate the exposed regions from the unexposed regions of the substrate, making the entire process more efficient and economical. It also features precise control over the dimensions of the circulating lines, ensuring reliable device performance. In summary, TOKYO ELECTRON MARK-8 photoresist machine is an effective tool for creating intricate patterns of metallic lines in a substrate. Its automated processes and precise control ensure reliable device performance, making it an invaluable tool for businesses in the electronics world.
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