Used TEL / TOKYO ELECTRON Mark 8 #9098641 for sale
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ID: 9098641
Wafer Size: 8"
Vintage: 1996
(1) Coater / (2) Developers System, 8", 1996 vintage.
TEL / TOKYO ELECTRON Mark 8 is a photoresist equipment used in integrated circuit production. The system is composed of an auto-exposure unit, auto-processing unit, and an auto-inspection unit. It features a resolution of 4 μm and is capable of handling wafers up to 8 inches in diameter. The auto-exposure unit is used for lithography, which is the process of using light to create a pattern onto a photoresist material. TEL MARK8 is designed to be used to expose fast and high quality photoplots onto photoresist wafers. This is accomplished by using ultraviolet light projected through a photomask composed of a pattern of chromium, molybdenum or other metals. The projected pattern is transferred onto the wafer by means of optically reducing the image projected through the photomask. The auto-processing unit is responsible for coating and developing the film exposed by the auto-exposure unit. Generally, the developers used on TOKYO ELECTRON MARK-8 unit are both acids-based and alkaline. After development, the auto-inspection unit shoulders the responsibility of inspecting the pattern to ensure that it is defect free. MARK-8 is a powerful and reliable tool in integrated circuit production. With a resolution of 4 μm and the ability to handle wafers up to 8 inches in diameter, the machine is capable of producing accurate and high quality photoplots in a timely manner. Its auto-exposure, auto-processing, and inspection units make it a user friendly and reliable tool. It is ideal for a wide range of integrated circuit production needs.
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