Used TEL / TOKYO ELECTRON Mark 8 #9159072 for sale
URL successfully copied!
ID: 9159072
Wafer Size: 8"
(2) Coater / (2) Developer system, 8"
(1) AD
(2) CHP
(8) PHP
(2) AHP
(5) CP
(1) WEE.
TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON Mark 8 is a photoresist equipment designed to enable observation of rapidly changing phenomena. The system is capable of detecting and controlling sub-micron ultra-fine patterning over short periods of time with high precision. It utilizes a scanning electron beam to expose photosensitive film with nanometer resolution and photo-etching performance. TEL MARK8 allows for the creation of a variety of patterns on any substrate, ranging from polymer-based substrates like polyimide to metal-based substrates such as aluminum. It has a wide range of resolutions available, with the highest resolution being 0.2μm. The unit also has the capability of scanning at high resolution in both X and Y Axis. TOKYO ELECTRON MARK-8 is capable of processing substrates up to 200mm in size and can handle a depth of 0-400mm in a given shot. The machine is equipped with a spin coater for uniform coating of the substrate and a multiple-axis stage for precision stages that has a maximum stage speed of 160 centimeter/minute (cm/min). It allows for a variety of applications, including 3D patterning, projection capillary and 3D mask printing. These features make MARK8 the preferred tool for many different applications in the microelectronic and semiconductor industries. TEL Mark 8 has an integrated exposure control software which enables easy operational adjustments for the desired exposure and substrate size. The asset also has a fast shutter that can reduces the total exposure time by 22%. The model utilizes a high-limit monitoring in order to provide rapid real time data feedback on the equipment efficiency in order to maximize tool performance. TEL / TOKYO ELECTRON MARK-8 utilizes a comprehensive in-lens system which focuses the primary beam accurately onto the object surface. This unit also has an inward-looking camera monitoring to ensure that the beam is properly focused on the substrate. The in-built calibration machine provides the user with easy setup and quick tool ready times. In addition to TEL MARK-8, TEL / TOKYO ELECTRON has an active aftermarket care and support program for users. They offer fast and reliable service and maintenance for the asset, as well as providing software and hardware upgrades. The company also provides training and documentation services in order to ensure that users get the most out of their TEL products.
There are no reviews yet