Used TEL / TOKYO ELECTRON Mark 8 #9239619 for sale

TEL / TOKYO ELECTRON Mark 8 Photoresist Equipment is a comprehensive tool designed to provide a wide range of functional benefits for semiconductor device fabrication. This system is an advanced photoresist (PR) processing solution for high-speed and high-dem of chip production. Manufactured by TEL, a world-leading semiconductor equipment supplier, TEL MARK8 is a fully automated lithography unit designed for use with 193 nm and deep ultraviolet exposure sources. The machine comprises a series of processing chambers equipped with a range of integrated photochemistry components. These components form a comprehensive PR tool capable of regulating the cleaning, coating, and exposure processes for a variety of PR types, allowing users to optimize process repeatability, reduce cycle times, and increase photoresist yield. The advanced coating solution deployed in TOKYO ELECTRON MARK-8 platform is capable of handling all existing PR processes, including thermal and nanoscale materials. The tool is designed to meet the demands of advanced R&D and commercial production, providing PR performance at feature sizes of 14 nm or lower, while also providing fast non-reflective and short cycle times. TOKYO ELECTRON Mark 8 asset can accommodate a wide range of PR characteristics, such as thickness range, refractive index refreshment rate, maximum and minimum amounts of solvents, and adhesion. Model software is capable of actively managing, adapting, and tracking PR inputs needed for the optimal process of each device. In addition, the equipment offers intelligent temperature control algorithms, multi-layer ultra-thin film control of the PR layer, and superior contamination management, allowing for prolonged photoresist lifespan. Mark 8 is also equipped with a robust metrology system, allowing for in-process control of coating uniformity, and other parameters needed for high-speed photo-chemical processes. The unit offers multiple access ports, allowing for wide-area exposure and optimization of the PR process. It also provides proven accuracy for substrate alignment and photoresist indentation. This allows users to achieve a higher level of image resolution and contrast than previously possible. In summary, MARK-8 PR machine is an advanced, comprehensive, and user-friendly tool designed to meet the increasing demands of the semiconductor industry. With its integrated photochemistry components, superior temperature control algorithms, and robust metrology systems, users can rest assured that the asset is capable of delivering a reliable and repeatable PR processing solution.