Used TEL / TOKYO ELECTRON Mark IV #293669153 for sale

TEL / TOKYO ELECTRON Mark IV photoresist equipment is a comprehensive solution designed to enable advanced lithography processes such as deep ultra violet (DUV), contact photo-lithography and optical proximity correction (OPC). This system enables the fabrication of complex high-resolution integrated circuits (ICs) from wafers. TEL Mark IV integrates several process tools, such as a multi-wavelength projection exposure tool, a vertical track, a photoresist track, and an automated resist handling unit, to form a single platform. The multi-wavelength projection exposure tool can draw complex patterns, such as device wiring and shapes, on wafers that have been emerged in a photoresist. The machine uses a combination of laser illumination and electron beam illumination, providing the ability to draw line widths as thin as 0.3DUV. The vertical track is responsible for process control, managing the positioning and orientation of wafers while they are exposed to the projection tool. Advanced algorithms, such as OPC, are used to optimize patterns to achieve desired line widths and print uniform images on the wafers. The photoresist track controls the development and spinning of photoresists for proper development and etching of the wafer. Automated resist handling systems provide precise control over handling and storage of wafers at every stage of processing — from loading and unloading of wafers to dispensing of requisite resist to ensure uniform development during fabrication. TOKYO ELECTRON Mark IV provides a comprehensive solution for photolithography processes, enabling IC designers to take advantage of advanced technologies while maintaining high resolution and accuracy. The asset can be used to manufacture transistors, memory chips, logic chips, cell-based logic chips and a variety of other types of ICs. Its ability to adapt to different process flows and its compact design make it an ideal choice for high-volume manufacturers. The model is backed by years of industry leading experience by TEL and TOKYO ELECTRON, and is designed to offer consistent results and maximum fabrication efficiency.