Used TEL / TOKYO ELECTRON Mark IV #9282004 for sale

ID: 9282004
Wafer Size: 8"
Vintage: 2011
Sputtering system, 8" 2011 vintage.
TEL / TOKYO ELECTRON Mark IV is a photoresist equipment typically used for semiconductor device fabrication. It is a platform-agnostic system that supports a wide range of substrates, such as silicon wafers, compound semiconductors, and silicon-on-insulator (SOI) wafers. The unit is designed for use in a broad range of applications, including photomask, direct imaging, photolithography, thin-film deposition, etching, and multichannel photolithography. TEL Mark IV photoresist machine features a high-resolution optical imaging tool, which can be configured for various substrate sizes. The asset is equipped with an automated motorized stage, making it suitable for high-throughput processes. Additionally, TOKYO ELECTRON Mark IV has a built-in illumination model, allowing for the illumination of substrates with different angles and intensities. A key feature of the equipment is its modular package, which offers a range of options to customize Mark IV to a specific application. It can be configured with an on-platform coating unit, enabling the user to control the resist coating conditions. This option also includes manual and automated spin-coat processes and plasma-activated resist processes. Additionally, temperature control can be achieved with the optional stage-heating unit. TEL / TOKYO ELECTRON Mark IV is a fast and easy-to-use system that is ideal for prototyping and development. With its high accuracy and high-speed imaging, the unit provides excellent results, even with complex substrates. Furthermore, the machine can be configured for a variety of processes, allowing it to be used in a wide range of applications.
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