Used TEL / TOKYO ELECTRON Mark V #149603 for sale

TEL / TOKYO ELECTRON Mark V is a photoresist processing equipment designed for use in the lithographic process of advanced semiconductor device fabrication. It delivers increased control of resist features and advanced surface planarization capabilities. TEL Mark V is able to process high-density resist designs and delicate features with accuracy and precision. The system uses a closed-loop unit featuring heated and cooled stages, multiple gas sources, and other components to create a clean, temperature-controlled and contaminant-free environment. It is capable of processing to very high levels of accuracy and process repeatability, including uniformity of motion, temperature and humidity control and surface planarization. The machine is optimized to achieve high-accuracy photoresist coating and etching. It includes a resist mixing chamber, a spin coating head, a resist stripping tool, and a hotplate that aids in resist removal. Additional features include a resist drying chamber, an etch chamber, and a chiller for post-process cooling of devices. TOKYO ELECTRON MARK-V has been designed with an integrated user interface that enables device engineers to easily adjust and modify settings to meet specific lithographic requirements. It allows for rapid changes in parameters such as speed and temperature, pressure, immersion times, and power levels, to enable precision etching and coating processes. In addition, MARK-V is equipped with a sophisticated process monitoring asset that provides real-time feedback on the status of processes and faults, and ensures tight process control for repeatable device fabrication. This model also automatically adjusts settings to ensure optimal performance of the equipment. In sum, TEL MARK-V photoresist system is an advanced tool for device fabrication, providing high-level of accuracy and process repeatability. Its integrated user interface and onboard process monitoring unit enable it to be adapted to a range of lithography requirements, while its numerous features support advanced processes such as etch and resist coating. TOKYO ELECTRON Mark V provides a reliable and efficient machine for photoresist processing.