Used TEL / TOKYO ELECTRON Mark V #149604 for sale

ID: 149604
(2) Coater / (1) Developer, i-Line.
TEL / TOKYO ELECTRON Mark V is a specialized photoresist processing equipment used for lithography in electronics fabrication. This system is capable of producing fine patterns of small components, down to 0.35 mm in size. TEL Mark V is an optical alignment unit that uses light to expose a photomask on the substrate, allowing for fine pattern generating. A mirror provides exposure from the back side, and an adjustable slit provides fine focus. A high precision projection lens projects the image of the photomask onto the substrate to generate the pattern. Plus, a high-end CCD camera is used for fine alignment and correction of exposure deviation. TOKYO ELECTRON MARK-V photoresist machine is designed to be highly modular, allowing custom assembly of the parts to satisfy any specific requirement. This flexibility allows for a variety of exposure parameters to be set, including resolution, focus and light exposure levels. It has many features to help ensure the accuracy of lithography. The auto-alignment function, coupled with the high-accuracy projection lens, results in better resolution and exposure accuracy. It can also be used to rapidly process large substrates. In addition, TEL / TOKYO ELECTRON MARK-V is designed with a flexible user interface. The use of a user-friendly graphical user interface (GUI) allows for independent control and fault monitoring of each module. Furthermore, the presence of an internal memory enables long exposures allowing for long enough process time for thicker resist layers. TOKYO ELECTRON Mark V is a reliable and precise photoresist tool for sub-micron patterning. It offers superior resolution, accuracy, flexibility and performance suitable for advanced lithography and fabrication processes. This cost-effective photoresist asset is ideal for modern semiconductor production and advanced research applications.
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