Used TEL / TOKYO ELECTRON Mark V #293596582 for sale

TEL / TOKYO ELECTRON Mark V is a multi-functional photoresist equipment for semiconductor fabrication. It is an advanced, computer-controlled cluster tool capable of processing a wide variety of substrates. Using electron beam technology, it is capable of high-precision patterning down to 150 nanometers. The system can be used to handle wafer sizes up to 8 inch, as well as single or multiple substrates. The built-in scanner enables high-speed mapping and alignment of patterns at high resolution. It also has a built-in liquid crystal imaging unit and an optical microscope to enable high-precision focusing of photomasks. TEL Mark V uses the V-CVD process, which is a variation of chemical vapor deposition. This process prevents oxidation and deposition of polymers, which can cause surface defects. It also ensures uniform surface layers and increases wafer yield. TOKYO ELECTRON MARK-V is also equipped with drift compensation technology, which allows for accurate beam positioning to create high-resolution patterns without any positional errors. For maximum yield, it also comes with advanced optimization algorithms to ensure optimal dosages and focus settings. The unit includes a high-power electron source for large-area patterning and programmable thermal fields to avoid pattern distortion. Mark V is equipped with the latest in photomask processing technology and can be used for applications ranging from LCDs to ultra-scaled semiconductor circuits and next-generation semiconductor devices. The machine is also portable, making it ideal for applications in production lines. Additionally, it is protected by an IP44 rating, which prevents particles, dust and liquids from entering the tool. Finally, it also benefits from advanced safety measures, including pad damage and oxidation protection.