Used TEL / TOKYO ELECTRON Mark V #293620464 for sale
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ID: 293620464
Wafer Size: 6"
Vintage: 2010
Coater / Developer system, 6"
Non-SMIF
Supply tank
Power supply: 200 VAC, 50/60 Hz
1990 vintage.
TEL / TOKYO ELECTRON Mark V is a photoresist equipment used in the fabrication of microelectronic circuits for semiconductors and printed circuit boards. The system is designed to rapidly and accurately develop images onto substrates such as silicon, metal, glass, and quartz. It uses a laser-driven transmissive exposure technique that can produce integrated circuits with feature sizes smaller than one micron. TEL Mark V utilizes an electron beam evaporation process that is capable of producing high aspect ratio features. This is achieved by using a focused laser diode to directly write patterns into a photoresist layer on the substrate. The exposure unit is comprised of an exposure bed, optical components, and a controller designed to accurately adjust the intensity, position, and duration of light exposure. The substrates are mounted on a rotating exposure bed that allows for more efficient image programming. The machine is also equipped with state-of-the-art polishing and etching tools. This equipment enables the user to achieve a highly uniform pattern on the substrate and maintain a consistent surface finish from lot to lot. The tool is capable of producing high precision results with uniform crystal structure and tight dimensional tolerances. This is due to the use of an advanced auto-focus feature that automatically adjusts the focus of the light beams during exposure. The device also incorporates advanced temperature control algorithms that enable accurate control of the resist layer temperature, allowing for optimal resolution. TOKYO ELECTRON MARK-V features enhanced user experience through advanced software and intuitive graphical user interface. This provides users with increased control and productivity within the exposure asset. The model is designed to support a wide range of substrate sizes and thicknesses, as well as ultra-high aspect ratio features. It also provides advanced networking and remote monitoring capabilities, enabling users to work collaboratively across multiple sites and time zones. TEL / TOKYO ELECTRON MARK-V is highly reliable and is designed to minimize product downtime. This is due to its ability to recover from faults caused by external conditions or equipment errors. The system also has a built-in safety monitoring unit that automatically shuts down the machine in case of any malfunction.
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