Used TEL / TOKYO ELECTRON Mark V #293620469 for sale
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ID: 293620469
Wafer Size: 5"
Vintage: 2010
Coater / Developer system, 5"
Non-SMIF
Control rack
2010 vintage.
TEL / TOKYO ELECTRON Mark V is a photoresist coating equipment designed for use in the development of the most sensitive and challenging photoresist-coated substrates. It is a high-performance, high-precision system that can coat substrates with a wide range of photoresists. TEL Mark V has a number of features that enable it to achieve maximum accuracy and efficiency when applying photoresist to a substrate. TOKYO ELECTRON MARK-V features a precision coating mechanism which provides precise and consistent thickness, width and coverage of the photoresist layer applied to the substrate. The coating is also closely monitored, so that any variations in coating quality are identified and rectified quickly. This ensures that the photoresist is properly applied with an even coating. TEL / TOKYO ELECTRON MARK-V also has a sophisticated control unit that allows for precise control of the coating parameters. This includes precise control of the speed, pressure and angle of the coating process. The control machine also helps ensure that the coating process runs smoothly and that the photoresist layer is properly applied. Another feature of TEL MARK-V is its ability to accurately measure the thickness and uniformity of the photoresist coating applied to the substrate. The tool uses precise, automated spectral and thickness measurements to help ensure that the photoresist layer is applied correctly. This helps minimise defects caused by over or under coating. MARK-V also offers a number of additional features that help it achieve high levels of accuracy and efficiency. These include a high speed coating asset, a wide range of photoresist features and a range of optional accessories which can be tailored to meet specific user requirements. Overall, TOKYO ELECTRON Mark V is a highly advanced photoresist model that is designed to provide accurate and consistent coating of photoresist to substrates. Its high-precision coating mechanism, sophisticated control equipment and precise measurement capabilities help ensure that photoresist layers are applied correctly. The range of features and optional accessories offered by Mark V make it an ideal choice for those seeking high-quality coating of photoresist-coated substrates.
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