Used TEL / TOKYO ELECTRON Mark V #293656063 for sale

ID: 293656063
Vintage: 1991
System 1991 vintage.
TEL / TOKYO ELECTRON Mark V is a photoresist equipment designed for positive lithography applications in semiconductor device manufacturing. Developed by TEL, Ltd., TEL Mark V is part of a comprehensive suite of solutions for wafer fabrication and is well-suited for companies that require sophisticated levels of automation and control. TOKYO ELECTRON MARK-V system features a high-speed laser beam scanner, which can run up to 30μm over any substrate type without the need for an additional focusing lens. It is capable of delivering precise light intensity control, integrated into a full-field light intensity modulation, to produce extremely fine patterns with highly consistent dimensions and shapes. In addition, Mark V is suitable for a wide range of exposures to various types of lithography materials, including photoresists, fluoropolymers, and photoresist-dies. MARK-V is designed for maximum throughput with advanced throughput optimizers that ensure consistent exposure times for each exposures sequence. Advanced process control algorithms and back-end analysis tools allow users to quickly detect and respond to problems in order to maintain production yields. In addition, the unit operator has the ability to spot abnormalities in real time, even during the exposure process, with the use of a predictive trending display. The machine is powered by a professional-grade processor board, which provides a high degree of precision and accuracy. This helps to ensure that all components of the tool are properly calibrated and operating efficiently. The processor board is also designed to handle multiple exposure sequences simultaneously, allowing users to maximize productivity while minimizing overall cost. In addition to the hardware components, TOKYO ELECTRON Mark V asset also comes with a range of software packages that further simplify the operation of the model. The user-friendly software suite includes advanced image acquisition and pattern registration tools, as well as post-processing software that enable the user to design their own patterns or utilize pre-defined ones to achieve desired results. At its core, TEL MARK-V is intended to enable users to quickly and accurately produce the perfect lithography patterns for their applications. With robust hardware, processing power and sophisticated software, the equipment helps ensure the best possible outcome from any production process.
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