Used TEL / TOKYO ELECTRON Mark V #293657043 for sale

TEL / TOKYO ELECTRON Mark V is an advanced photoresist equipment used in lithography processes in the manufacture of semiconductor integrated circuits. The system comprises a scanner, an optical unit, a controller, a vacuum device and a process chamber. TEL Mark V scanner is capable of delivering sub-micron resolution on substrates up to 200mm in size. It is fitted with a carbon dioxide laser for faster imaging and greater accuracy. The optical machine includes mirrors, lenses and apertures for laser beam manipulation. The controller is responsible for executing programmable motions within the chamber and can be used for controlling the scanner head and optics or feeding substrate into the processing chamber. The vacuum device provides the low pressure environment required for the tool to operate. It is capable of maintaining a pressure range of 1-3Pascals within the processing chamber. The process chamber is used for the lithography process where the laser beam is directed onto the substrate and the photoresist is applied. The asset is able to regulate temperatures generated within the chamber and is equipped with a cooling medium. This ensures that the photoresist is evenly spread across the substrate and prevents any burning during exposure. TOKYO ELECTRON MARK-V is an effective photoresist model suitable for use in lithography processes. It provides industry standard resolution and accuracy when used in the production of semiconductor integrated circuits, and benefits from advanced optical, temperature and pressure control.