Used TEL / TOKYO ELECTRON Mark V #9111393 for sale
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TEL / TOKYO ELECTRON Mark V Photoresist Equipment is a process-integrated maskless lithography system that provides superior patterning capabilities over conventional mask making and lithography processes, making it ideal for a range of advanced applications. The unit is composed of a range of components, each of which are designed to provide precise and efficient patterning abilities. At the heart of the machine is the photo-optical optical scanning tool, used to project images onto the photoresist layer of the substrate. This asset comprises a high-resolution laser scanner, a dual-scan optics model and a fine-adjustment optical module. The equipment is capable of achieving excellent photolithography on substrates with high image quality. TEL Mark V is powered by a Windows 10 based, user friendly system controller which allows precise and repeatable control of the unit components. The controller is equipped with a graphical photomask editor and a variety of application software to assist in the setup and automation of the photolithography process. At the beginning of the photoresist machine, an alignment tool is used to accurately register substrates and ensure they are correctly orientated for imaging. The tool is also equipped with a wafer clamping mechanism to ensure the substrates remain stationary during the exposure process. In order to ensure optimal clarity of the images, TOKYO ELECTRON MARK-V features a non-contact laser measurement asset to accurately control the intensity and uniformity of the light exposure pattern. The model is also equipped with a sample monitoring equipment to enable real time analysis of substrate placement and exposure. In terms of imaging, this photoresist system is capable of producing patterns with a resolution of 0.2 um and a linewidth down to 0.2 um, making it suitable for a range of applications including semiconductors, MEMS, optical sensors and more. To enable efficient and convenient operation, Mark V has an intuitive user interface that allows the user to configure, monitor and troubleshoot the unit components. The machine also features a range of error detection capabilities to provide reliable process control and minimise downtime. Overall, TOKYO ELECTRON Mark V Photoresist Tool is an advanced and powerful choice for photolithography, offering excellent imaging capabilities and efficient operation with its user friendly software and intuitive user interface.
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