Used TEL / TOKYO ELECTRON Mark V #9225994 for sale

TEL / TOKYO ELECTRON Mark V is a photoresist equipment used in the manufacture of semiconductor integrated circuits and other microelectronic devices. This system is designed to provide precise lamination precision and high-precision coating and exposure control. The photoresist unit comprises a microprocessor control machine, a vision tool and an array of programmable ultraviolet (UV) and optical exposure sources. The microprocessor controls the lamination and uniform coating processes, vision asset and exposure settings and provides the user with the ability to perform both regular and ad hoc process adjustments. The model features a wide range of options for UV and optical exposure sources to suit the production process. These include 532nm and 1064nm laser exposure sources, Excimer, ArF and KrF-compatible exposure sources, and platform-supported multiple exposure sources. The vision equipment of TEL Mark V photoresist system provides precise control of the overall film uniformity and homogeneity. Additionally, the unit uses an ultra fine stepper to achieve a high level of substrate and layer precision. TOKYO ELECTRON MARK-V photoresist machine can handle a variety of substrates including silicon, glass and metal also handle beam step applications with a minimum size of 5um. It is also designed to facilitate a wide array of production processes including etching, pattern printing and layer transfer. The tool is capable of providing a number of features designed to make production more efficient. These include in-line processing for continuous production, high throughputs, pattern optimization and substrate matching capabilities. To enable precise operation and to maintain the highest levels of consistency, TEL / TOKYO ELECTRON MARK-V photoresist asset includes process control features such as track watch, auto calibration as well as a visualization and monitoring model. This equipment also offers alarm setting, data recording, statistical analysis and support for multiple communication protocols. Overall, MARK-V photoresist system is an advanced photoresist unit capable of providing reliable, reproducible, and high-precision coating, lamination and exposure performance. The machine's integrated vision tool as well as its wide range of exposure sources and intelligent process control features make it suitable for production environments that require precise and reliable results.