Used TEL / TOKYO ELECTRON Mark V #9226212 for sale
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ID: 9226212
Wafer Size: 6"
Vintage: 1992
(1) Coater / (3) Developer system, 6"
1992 vintage.
TEL / TOKYO ELECTRON Mark V Photoresist Equipment is an integrated, semi-automated system that can be used for lithography processes. It is designed to both accurately dispense and precisely expose photoresist to produce high-resolution patterns on wafers for the fabrication of microelectronic devices on a larger scale. The unit is composed of several key components: a main console, a detector head assembly, an exposure unit, and a Wafer Alignment Machine (WAS). The main console is the centerpiece of the tool, providing both an interface for controlling the asset and for displaying the status and results of the operations. The main console also houses the fluid delivery model, which is used to accurately dispense photoresist and other liquids into the equipment during lithography processes. The detector head assembly is the mechanism that moves the wafer toward and away from the exposure unit, as well as making sure that the wafer is correctly aligned with the exposure unit's optics. The exposure unit is responsible for projecting the patterns onto the wafer using a programmable laser, while the WAS is the mechanism by which the detector detects misalignments between the photoresist, the laser, and the wafer itself, allowing for corrections to be applied. The system also employs a feedback unit which, along with the WAS, helps ensure that both the exposure and dispense operations are done with the highest precision. The feedback machine consists of several detectors which are placed near the photoresist delivery nozzle, the laser, and the wafer. These detectors measure the resistivity of the photoresist, and also detect the actual exposure time and laser current. This feedback helps to guarantee the accuracy and quality of the lithography processes. In addition, TEL Mark V utilizes several safety features, such as an emergency stop tool, an interlock safety systems, and a camera-based presence detection asset to make sure that the wafer is in the proper position before the exposure process can begin. All in all, TOKYO ELECTRON MARK-V Photoresist Model is a powerful tool for producing accurate patterns on wafers with high precision. With its accurate dispensing equipment, programmable laser, feedback system, and safety features, the unit is capable of providing reliable and consistent results for the fabrication of microelectronic devices on a larger scale.
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