Used TEL / TOKYO ELECTRON Mark V #9226372 for sale

TEL / TOKYO ELECTRON Mark V is a photoresist equipment designed to optimally image thin film layers over large wafer areas with a resolution up to 100nm. It uses a Chromatic Aberration Corrected lens to obtain a very high resolution and a high dose of exposure with a short exposure time. TEL Mark V system is powered by a Pulsed Laser Source which uses an excimer laser as a light source. This unit is capable of delivering high dose exposure with a time resolution of 0.23 milliseconds. The laser source is technically stable with an excellent uniformity of the dose over the entire wafer. TOKYO ELECTRON MARK-V machine is equipped with 'Over-the-air' (OTA) measurements of exposure dose and depth uniformity. This allows for high precision control of the quality of the photoresist images. The tool can help streamline the photolithography process with its intuitive and easy to use software. It can provide access to all the parameters needed for successful photolithography processes. It also allows for efficient recipe and parameter control, error prevention, and in-situ process control. The asset has excellent stability and low maintenance requirements, allowing for increased productivity. It allows for precision registration, high-accuracy alignment, and alignment feedback. It also supports the stages and loads up to 200mm wafers in a single position OTA. MARK-V photoresist model is a reliable tool for process engineering, and its use helps to reduce manufacturing costs by allowing for the performance of multiple photo resist layers over larger areas of the substrate. This equipment is suitable for the production of precision and small pattern critical devices.