Used TEL / TOKYO ELECTRON Mark V #9226375 for sale

TEL / TOKYO ELECTRON Mark V Photoresist Equipment is a lithography tool designed for precise and uniform etching of photoresist on silicon wafers. This system is a result of many years of developing and innovating the photoresist deposition and etching process. It is designed to be a reliable and efficient tool for the fabrication of integrated circuits on extremely subsurface substrates. TEL Mark V is used by semiconductor manufacturers for deposition and etching of photoresist layers on a substrate surface before the fabrication process can begin. This process, known as photolithography, is necessary for the transfer of circuit patterns to the silicon wafer in a precise and accurate manner. TOKYO ELECTRON MARK-V's advanced technology is equipped with 2D resolution control, stable uniformity, cleanliness and choice of high performance aqueous and dry developers. All tools are designed to accommodate substrates up to 300 mm in diameter and provide optimal results with a scheduling flexibility of up to four tanks. Mark V features a dual chamber, or dual-cabinet design that offers higher cleanliness levels than standard photolithography tools. The clean chamber is equipped with an isolation layer that seals off the atmosphere, eliminating nearly all environmental contamination. MARK-V also utilizes a special software that is designed to create complex image patterns with total consistency and accuracy. The unit is capable of processing a broad range of photoresist materials, including spin-on and spray coating. TEL MARK-V has been optimized to reduce particle contamination and improve the uniformity of resist film thicknesses within a range of 1 μm to 2 μm. TEL / TOKYO ELECTRON MARK-V provides an impressive list of performance benefits. It is capable of precise resist film thickness control, high resolution patterning, quick process time, cleanliness levels of 99.5%. containment and low particle emission, as well as excellent uniformity. Additionally, the machine offers flexible two-color wetting and utilizes various automation techniques, making it easy to configure, program, and operate. TOKYO ELECTRON Mark V is a highly robust and reliable tool, backed by comprehensive service programs from its manufacturer.