Used TEL / TOKYO ELECTRON Mark V #9226378 for sale

TEL / TOKYO ELECTRON Mark V is a high-precision photoresist equipment that is used to etch intricate patterns on a semiconductor substrate. It is a single-wavelength photoresist system that offers high-precision, high-speed film development. TEL Mark V utilizes a Computer Controlled Optical Unit (CCOS) and a gas-phase exposure tool (GEPT) to simplify the etching and patterning process. TOKYO ELECTRON MARK-V provides excellent resolution and uniformity of features as well as high velocity film development. It is equipped with an advanced pattern alignment machine (PAS) offering real-time exposure position correction, making it possible to position patterns on a substrate with high precision. In addition, the development tool is high-speed and accurate, with a high throughput motorized laser-based resist alignment and uniform exposure. Mark V provides a wide variety of exposed oxidized films and reduced blowholes, allowing for greater design flexibility and improved circuit performance by using extremely thin lines and tightly formed features. It also offers an advanced line edge roughness (LER) reduction asset for superior patterning results. With its chemical precursor control mechanisms and fine-tuning of resist parameters, TEL MARK-V ensures high performance patterning with tight pitch and small feature sizes. Thanks to its advanced array of features, MARK-V model is perfect for highly complex and intricate resist applications. It is ideal for applications requiring fast, precise, and accurate etching solutions, such as in the manufacturing of semiconductor wafers and memory chips. Its high-speed film development, optimal pattern alignment capabilities, and advanced LER reduction equipment make it a reliable and efficient choice when precision patterning is required.