Used TEL / TOKYO ELECTRON Mark V #9290142 for sale

TEL / TOKYO ELECTRON Mark V photoresist equipment is a high-performance, high-accuracy wafer processing tool designed for semiconductor fabrication and related processing applications. It features a unique automotive-grade design that makes it highly reliable and robust. TEL Mark V is renowned for its precise control of both the temperature and the deposition parameters of the photoresist coating, enabling smooth deposition with consistent, high-quality results. TOKYO ELECTRON MARK-V can be used for various processes, such as spin-on-glass coating, lithography, and etch. The system consists of several components: a wet-etching module, a metering unit, a photoresist source, an electrical contact unit, a thermal station, and a control unit. The wet-etching module has a process chamber, which is equipped with a dual modulating wafer housing, as well as a heated water bath for pre-etching of wafers. This ensures uniform wet etching and excellent temperature control. The metering unit supplies the photoresist source with the correct amount of material, allowing for precise and consistent wafer coatings. The photoresist source is a vacuum unit that can generate high-speed, precise, and uniform deposition of photoresist on the wafers. The electrical contact unit is responsible for allowing electrical connections from the tools outside the process chamber, so that it can be monitored at all times for accurate process control. The thermal station regulates the temperature of the process chamber, ensuring precise and repeatable results. Finally, the control unit allows for full process automation, enabling the users to observe and control the process remotely from the control unit. MARK-V is an advanced machine that enables fast and efficient wafer processing. It is designed to operate reliably and consistently, and provides excellent resolution, accuracy, repeatability, and results. This makes it an excellent choice for any organization looking for a reliable and efficient photoresist tool for their processing needs.