Used TEL / TOKYO ELECTRON Mark V #9384736 for sale

TEL / TOKYO ELECTRON Mark V photoresist equipment is an advanced technology used for the fabrication of ultra-high density integrated circuit chips. It enables the deposition and etching of resist layers on the thin circuit films. The photoresist system is specifically designed for leading edge wafers and microprocessors. It is a high-performance machine that combines a sophisticated optical unit with an advanced process control machine. TEL Mark V consists of several components, including a submicron aligner, a photoresist dispense module, a chemical pre-strip module, a plasma stripper module and a resist strip module. The aligner is used to precisely align the wafer with the photoresist dispense unit, while the photoresist dispense module is used to dispense photoresist photosensitive material onto the wafer. The chemistry pre-strip module is used for preliminary wafer preparation in preparation for the resist photography. The plasma stripper module enables the plasma etching of certain layers as required. Finally, the resist strip module enables the removal of the resist layers after development. The submicron aligner of TOKYO ELECTRON MARK-V enables alignment of the features on the wafer with the imaging tool with submicron accuracy. The tool is equipped with a variety of alignment methods, including scan align, smooth align, and focus align. The photoresist dispense module of MARK-V consists of an automatic endpoint monitor, which is used to track the photoresist exposure status during deposition. It also contains a thermoconductor dispense sensor, which is used for accurate positioning of the photoresist. The advanced process control asset of TEL / TOKYO ELECTRON MARK-V consists of a temperature controller, which is used to monitor the temperature of the wafer and the photoresist material in order to precisely control the image quality. The model also has an automated substrate-analysis tool, which enables rapid determination of key wafer characteristics. Mark V photoresist equipment provides extremely precise and high-performance fabrication of ultra-high density circuit chips. It enables fast and accurate alignment and deposition of photoresist material, allowing for the production of complex devices to the highest possible standards. The advanced process control system allows for careful temperature monitoring and substrate analysis, further increasing the accuracy of the results.