Used TEL / TOKYO ELECTRON Mark V #9396047 for sale

TEL / TOKYO ELECTRON Mark V is a photoresist equipment designed for high productivity and superior process control. It offers a wide range of capabilities while allowing for fast, efficient and precise operation. The system utilizes a spectral-selective imaging technique to provide high-resolution images with a high density of pattern elements in a single exposure. The unit is composed of a resist exposure machine, a resist processing tool, a wafer transfer asset, and a wafer stage section. The resist exposure model includes a removable digital imaging plate, a multichannel exposure source, a shutter equipment, and a sophisticated control system. The resist processing unit offers high resolution development and advanced ultraviolet imaging features. The wafer transfer machine enables rapid transfer of wafers from one station to the next. The wafer stage section is equipped with a precision stage to ensure accurate and repeatable wafer placement throughout the processing cycle. TEL Mark V offers superior image resolution and exposure source flexibility as well as advanced alignment capabilities with a variety of wafer types. The tool features automated wafer alignment which eliminates manual manual alignment and ensures precise registration for exposure masks. The exposure asset also has a number of different exposure sources, including laser and optical sources. Additionally the model has advanced controlling capabilities which enable efficient manufacture of a wide range of semiconductor integrated circuits. In addition to its high-precision capabilities, the equipment also features sophisticated fault sensing, which can detect and diagnose any faults or irregularities that may affect processing performance. TOKYO ELECTRON MARK-V is also equipped with a data logging system which monitors and stores temperatures, pressures, and other data for quality control and analysis. The unit can also be interfaced with a variety of peripheral equipment, such as pattern generators and handling systems. Overall, Mark V offers excellent performance and reliability in the production of complex semiconductor and photoresist products. By leveraging its advanced imaging and control capabilities, the machine allows superior process control and yields excellent results with high production efficiencies. The tool is designed to ensure that all parts of the photoresist process are accurately and efficiently handled, significantly reducing the time and costs associated with chip fabrication and design.