Used TEL / TOKYO ELECTRON MARK Vz #293587287 for sale

TEL / TOKYO ELECTRON MARK Vz
ID: 293587287
Wafer Size: 6"
(2) Developer system, 6".
TEL / TOKYO ELECTRON MARK Vz is a state-of-the-art photoresist equipment for nano-fabrication that provides precise and high-opacity resist imaging solutions for making ultra-small resistor and/or integrated circuits (ICs). With its superior speed and accuracy, it is one of the most comprehensive and reliable photoresist systems for making photosensitive devices within the semiconductor industry. TEL MARK-VZ photoresist system is equipped with an automatic optimum exposure (AOE) unit that offers precise and consistent resist exposure. The AOE machine integrates optimized exposure parameters: the exposure energy, dose, and time necessary to create reliable resist patterns. TEL proprietary temperature-controlled Jig enables consistent and low temperature resist applications, while the substrate height control (SHC) provides superior resist uniformity and responds quickly to resist height changes. The versatile TOKYO ELECTRON MARK V-Z tool is designed to handle any type of resist and substrate material with ease, including both positive and negative photoresists. The conditions for dissolving and developing resist images can be easily changed with the touch of a button, allowing for adaptability to the exact needs of each specific project. MARK V-Z is also equipped with a high-resolution pattern recognition capability, which permits quick and easy automatic alignment when transferring images from one target substrate to another. Furthermore, MARK-VZ photoresist asset is designed with the capacity to accept additional modules and components, such as an additional wafer sampler, and an additional substrate or wafer transport model, depending on the specific needs of a particular application. TOKYO ELECTRON MARK Vz offers flexibility, precision and versatility in a single, powerful equipment. It is an ideal investment for setting up functional and economical nano-fabrication for all kinds of applications, from complex ICs to photo-sensitive devices.
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