Used TEL / TOKYO ELECTRON MARK Vz #293591400 for sale

ID: 293591400
Vintage: 1997
Coater / Developer system 1997 vintage.
TEL / TOKYO ELECTRON MARK Vz is a fully-automated photoresist equipment designed for use in semiconductor and photomask fabrication processes. The system features a five-axis robotic spinner for faster and more precise process control. The robot is capable of spinning up to 1800 RPM, giving the user more control over the processing needs. The unit also features a built-in automated vision machine, with tracking technology that allows for more accurate placement of photomasks on the work surface. The vision tool also enables the asset to detect process recipe parameters, allowing for quicker and more accurate process control. TEL MARK-VZ model also features a high-precision spinner drive, which provides consistent and even deposition rates of photoresist. This ensures uniform layer thickness across the entire wafer. In addition to the high-precision spinner drive, the equipment also includes a precision sprayer, controlled via PLC. This system includes a built-in image analysis capability, which allows the unit to adjust process parameters on the fly. This ensures greater accuracy and process consistency. The machine also includes a number of process monitoring, feedback and control systems. This includes temperature and pressure indicators, which provide feedback while the process is taking place. It also includes a concentration monitor, which provides feedback on the photoresist formulation. Finally, TOKYO ELECTRON MARK V-Z tool includes a user interface for setting up and monitoring processes. This user interface is designed for easy operation and allows for quick setup and monitoring of process parameters. The interface also provides detailed information about the process parameters, to help ensure accurate and consistent results over time.
There are no reviews yet