Used TEL / TOKYO ELECTRON MARK Vz #9148231 for sale
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ID: 9148231
Vintage: 2000
Coater & developer
2C (3Nozzle+EBR)
2AD
4HP
2COL
1CWDS
Right
Stand alone
2000 vintage.
TEL / TOKYO ELECTRON MARK Vz is a photoresist equipment for creating microfabricated features on wafers. Using a combination of illumination and projection optics, the system is capable of exposing advanced designs onto substrates with high precision and accuracy. The exposure unit has a 40 micron resolution and can expose substrates up to 200mm in size. TEL MARK-VZ uses an energy-sensitive photoresist to expose the substrates. This sensitive material reacts to light exposure, allowing for the precise placement of features onto the substrates. This photoresist is then processed in a specialized developer, which removes the exposed photoresist to reveal the underlying structures. TOKYO ELECTRON MARK V-Z features a variety of exposure modes, such as vector scan, contact printing, dynamic scan exposure, and more. This provides users with a wide range of options for generating high-quality structures on substrates. Additionally, the machine is equipped with a high-precision motion tool and optics asset for precise alignment of features during exposure. In addition, TEL / TOKYO ELECTRON MARK-VZ has an advanced software package that allows users to program exposure parameters and features, and control the motion model for accurate alignment. The equipment also features an image inspection tool that can detect defects on the wafer and help ensure high-performance manufacturing. MARK-VZ is a powerful, advanced photoresist system for generating microfabricated structures on substrates. With its high-resolution exposure capabilities, precision motion control, and advanced software features, the unit is capable of creating highly precise and accurate microfabricated structures.
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