Used TEL / TOKYO ELECTRON MARK Vz #9148234 for sale
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ID: 9148234
Vintage: 1997
Coater & developer
3D (E2 nozzle+Back rinse)
5HP
5Col
Right
Stand alone
1997 vintage.
TEL / TOKYO ELECTRON MARK Vz photoresist equipment is a state-of-the-art lithography system designed to produce highly precise images and patterning on semiconductor wafers. The unit utilizes a special liquid chemical known as photoresist, which enables the precise production of a pre-determined pattern of images, typically for the production of integrated circuits (ICs). TEL MARK-VZ features an automated and computerized stopper unit, which precisely times the exposure time of the photoresist. It also includes a spin coater, which is used to evenly apply the photoresist liquid onto a wafer. The spin coater rotates at a very fast speed, perfectly spreading the photoresist onto the wafer. The machine also features a wafer chuck that guides the wafer during exposure and gives it a steady position. This ensures that the desired image or pattern is accurately printed onto the wafer. Additionally, TOKYO ELECTRON MARK V-Z boasts a semi-automatic centering device and one-click centering, which ensures that the pattern is always accurately aligned and centered on the wafer. Finally, MARK V-Z has an auto-level feature which ensures that the patterned wafer is always level and properly aligned with the substrate. This helps to increase the accuracy and precision of the photolithographic process. Overall, TEL / TOKYO ELECTRON MARK-VZ photoresist tool is a highly advanced, computerized and automated lithography asset designed for precision production of complex patterns on wafers. By using state-of-the-art equipment, such as the stopper unit, spin coater, wafer chuck and auto-level feature, it is able to precisely and accurately produce patterns for the production of ICs.
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