Used TEL / TOKYO ELECTRON MARK Vz #9217704 for sale
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TEL / TOKYO ELECTRON MARK Vz is the latest offering from TEL, a premier photoresist equipment designed to provide the highest level of accuracy and precision in photolithography. TEL MARK-VZ is a modular system with a wide range of components, including multiple exposure heads, stages, a controller, and an ASME remote handling module. It is capable of processing substrates up to 300 mm in diameter, with UV exposure wavelengths from 200 to 365 nm. The unit features a state-of-the-art control panel, which allows users to quickly and easily adjust the machine's settings, including the power and speed of the exposure heads, as well as the focus and exposure settings of the stage. In addition, the controller is capable of integrating with the advanced ASME remote handling modules, which provide further control and accuracy to the photoresist operation. The main components of TOKYO ELECTRON MARK V-Z are the SEMINAR Series exposure heads. These highly reliable heads generate uniform and consistent light fields that are ideal for processing fine-line photomasks. The exposure heads can be configured in a variety of configurations, allowing users to scale their exposure operation according to their needs. The process also features a 3-axis positional registration tool to ensure the highest level of accuracy. TEL / TOKYO ELECTRON MARK V-Z also features an advanced liquid handling asset, which ensures a uniform application and distribution of the photoresist onto the substrate. This eliminates the need for manual adjustments when changing substrates, allowing for streamlined photolithography operation. In addition, the model is compatible with a wide range of resist materials, including both organic and inorganic resist films. TOKYO ELECTRON MARK-VZ also features a wide range of advanced safety features, which serve to protect users and their equipment. The equipment is equipped with virtual edges, which detect if the substrate enters an unsafe zone and stops the process immediately; as well as a redundant pre-evacuation protection system, which ensures that all liquids are safely contained during the processing procedure. TEL / TOKYO ELECTRON MARK-VZ is a highly advanced photoresist unit that delivers the highest level of accuracy and precision. With its modular design, advanced safety features, and wide range of components, MARK V-Z is the ideal solution for those who require fast and effective photolithography operations.
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