Used TEL / TOKYO ELECTRON PDS-BX02E0954 #293658856 for sale

ID: 293658856
Controller EPD Canopus P/N: 2L80-002677-21.
TEL / TOKYO ELECTRON PDS-BX02E0954 is a photoresist equipment that enables the precise masking or reproduction of a pattern onto a substrate. It offers superior performance in terms of high precision imaging, resolution, and throughput. The system contains three main components: an electron beam generator, a laser light source, and a process chamber. The electron beam generator produces a beam that is focused and directed by an objective lens along the beam path. The laser light source generates laser light, which is used for pattern writing. The process chamber contains an environmental control unit, which keeps the process chamber clean and vacuum tight. TEL PDS-BX02E0954 has a very efficient imaging machine, which makes use of a J-Type lens to increase process efficiency. This lens facilitates the uniform imaging of the electron beam over the entire substrate, resulting in high-resolution patterns. Furthermore, TOKYO ELECTRON PDS-BX02E0954 employs a specially designed computer control unit that can process up to five million megapixels per second. This significantly enhances pattern writing speed and accuracy. PDS-BX02E0954 is ideal for Hi-K and Copper interconnection applications and has been successfully used in communications and memory production. It has a wide range of capabilities, including pattern down scaling, contour corrections, pattern compression, image pattern optimization, and contact hole-filling. Additionally, the tool supports operations with the latest lithography designs, such as double patterning and electron beam direct write. The asset also features an innovative temperature control model to help ensure repeatable results and accuracy of the patterning process. This equipment actively adjusts the process parameters in order to optimize each exposure. Additionally, the system utilizes minimal power consumption, making it an economical choice for large-scale production runs. TEL / TOKYO ELECTRON PDS-BX02E0954 provides excellent precision and advanced technologies for the creation of highly complex and detailed circuit structures. It offers a cost-effective solution for production of cutting-edge devices and is perfect for high-volume production.
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