Used TEL / TOKYO ELECTRON PHP Oven for ACT 8 #9275723 for sale

TEL Act 8 PHP Oven is a thermal annealing equipment that is designed for photoresist processing. It uses a combination of a hotplate and irradiation source to precisely heat and cure photoresist films. The hotplate in the Act 8 PHP has a temperature range from 200 to 400°C and can be controlled to within ±0.2 to 1.0°C accuracy. The hotplate is cooled using a built-in cooling system that uses a water-cooled jacket to reduce temperature rise and maintain a consistent temperature. The irradiation source of the Oven is a tungsten-halogen lamp with a power of 375W. It is capable of irradiating longwave ultraviolet light in the range from 310 to 410nm. It has a compact design and is adjustable to irradiate photoresist films over a range of 1 to 9mm. The Act 8 PHP Oven is capable of effectively curing photoresist films within a short time. It has a quick temperature rise setting, which can reach the desired temperature quickly without stressing photoresist films due to excessive temperature fluctuations. The Oven also has a Smart Pilot function, which allows for smooth and even local annealing on different film shapes. It has an accurate timing unit for the irradiation source, and may be pre-set to not exceed protective light exposure times. The Act 8 PHP Oven is an advanced thermal annealing machine that is suitable for photoresist processing. Its built-in technology ensures precise temperature control and evenly distributed irradiation to provide optimal conditions for processing photoresist films. It is also able to reach the desired temperatures rapidly while protecting photoresist films from damage due to excessive temperature fluctuations.