Used TEL / TOKYO ELECTRON PHP Oven for ACT 8 #9275822 for sale

TEL / TOKYO ELECTRON PHP Oven for ACT 8 is a 'photoresist' equipment which is designed for the use in semiconductor device production and FA for LCD panel Devices. It uses TEL-B-Tech PPS technology to provide precise and stable heating to obtain the optimal results for sensitive electronics. The phosphorus oxychloride (POCL3) type resist layer that is used in the photolithography process of fabricating the LCD panel devices is heated in the PHP oven to ensure consistent quality. The PHP oven is comprised of a short chamber and heating zone, exhaust zone, diffusion zone and an exhaust chamber. It's designed to efficiently reduce the amount of oxygen to a level of 2ppm or less to maintain the stability of the POCL3 resist layer. The heating zone is equipped with Peltier elements to keep the temperature of the system within a range of 20- 200°C, fifteen separate channels of heat. The diffusion zone is also equipped with Peltier elements to keep the temperature of the oven within a range of 0-200°C. Additionally, the exhaust chamber has a decontamination unit that prevents outgassing of POCL3 to the environment. The PHP oven also features a high power PIR infrared lamp which increases the heat conduction from the oven chamber to the substrate, leading to better results. It also uses an electrostatic filter to reduce the fine dust emitted from the exhaust zone. Additionally, its control machine is equipped with vacuum control and temperature control. TEL PHP Oven for ACT 8 is a reliable and efficient way of providing stable conditions for production of sensitive electronics, specifically to fabricate LCD panel devices. This tool is designed to provide fast and predictable results with minimal error and risk.