Used TEL / TOKYO ELECTRON PHP Oven for ACT 8 #9276948 for sale

TEL / TOKYO ELECTRON PHP Oven for ACT 8 is ahigh-performance photoresist equipment designed to accurately control the temperatures needed for optimal photoresist profiling. This system provides an ultra-precise and consistent heat transfer which eliminates high temperatures that cause photoresist particles within the substrate to expand and dislodge. This is achieved by the oven's dual-wall pyrolytic-coated quartz chamber and respective heating unit. This machine consists of an upper quartz chamber wherein the photoresist is held, with the lower quartz chamber containing a proprietary sub-floor heating tool. The two individual chambers are joined via gas-filled seals, thus forming an airtight heating environment.The sub-floor heating asset transports heat into the quartz chamber via a central heating element. An ultra-quick response thermocouple is installed to measure process temperatures in real-time, thus allowing for quick reaction time and precise thermal control. TEL PHP Oven for ACT 8 offers a temperature range of between 50 to 300 °C, which is precisely controlled by a unique forced-air convection algorithm. This algorithm monitors the speed of temperature change within the quartz chamber and, if necessary, consolidates the movement through the use of a stream of air. This ensures the temperature within the quartz chamber not only reaches the required levels quickly, but also maintains temperatures with excellent accuracy and consistency. The Oven also contains a series of heat pointing systems that are laser-focused and individually controllable. The respective heat pointed may be used to isolate or even increase the heat distribution across the substrates. This model can also be used to create a basal temperature prior to any chemical process within the quartz chamber. An additional feature is the equipment's unique self-monitoring technology, which ensures the safety of both personnel and equipment. It does this by detecting any temperature overloads and responding by shutting off the heating supply. Overall, TOKYO ELECTRON PHP Oven for ACT 8 provides high accuracy and reliability through its ultra-precise temperature controls and forced-air convection mechanisms. This ensures that any photoresist process conducted with the system will result in the best possible quality outcome.